Specifications:
| Resolution |
Accelerating voltage 15 kV, working distance 4 mm - 1.0 nm
Accelerating voltage 1 kV, working distance 1.5 mm - 2.0 nm |
| Magnification |
Magnification: High magnification mode - 100X to 800,000X
Low magnification mode - 30X to 2,000X |
| Electron Optics |
Electron Gun - Cold cathode field emission type
Extracting voltage - 0 to 6.5 kV
Accelerating voltage - 0.5 to 30 kV
Lens - 3-stage electromagnetic lens, reduction type
Objective lens aperture - movable aperture
Astigmatism correction coil - electromagnetic type
Scanning coil - 2-stage electromagnetic-deflection type |
| Specimen Stage |
Tilt -5 degrees to +70 degrees
Rotation 360 degrees (continuous)
Specimen size - Max. 150 mm diameter (airlock specimen exchange) |
Scanning Transmission Electron Microscope (STEM)
Specifications:
| Resolution |
1.5 nm (with accelerating voltage 30 kV, WD 8 mm and magnification 150,000X) |
| Detector |
Scintillator + photomultiplier system |
| Specimen |
thin-sectioned specimen mounted on a 3 mm diameter specimen grid |
| Mode |
Bright field image |
Zyvex IC Nanoprober System
Specifications:
| Sample Size |
12 mm diameter |
