nasafacility

Center for Nanostructures

Bannan Engineering

Hours: 8:30am - 5:30pm

Phone: (408) 551-1712

Fax: (408) 554-5474

Click here to see a map

Centers » Center For Nanostructures » Nanostructure Characterization Facility in NASA Ames

im60651C440BA5_final

Nanostructure Fabrication and Characterization Facility

This facility is a 1300 sq. ft. leased lab space located in NASA Ames Research Center, which features the following:

PECVD

Plasma-enhanced chemical vapor deposition (PECVD) system
Magnetron sputtering system
Scanning electron microscope (SEM) with electron beam deposition capability
Thermal imaging system for nanoscale devices
Thermal interface materials (TIM) resistance measurement system
Chemical fume hood
De-ionized water
Compressed air and natural gas lines