Seminar Series on Nanotechnology
Self-Assembled Semiconductor Heterostructures Dr. Ted Kamins
Hewlett-Packard LaboratoriesTuesday, October 14, 2003, 4:00- 5:30 p.m.
Wiegand Teleconference Room, Arts and Sciences Building
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As integrated-circuit features scale to smaller dimensions, the physics of device operation and the economics of circuit fabrication become more challenging. Much of the cost arises from the lithography needed to form very small device features, making self-assembled nanostructures an attractive potential approach to forming very small features. Both zero-dimensional and one-dimensional structures can be useful. Coarser lithography can be used to position these structures without requiring fine-scale lithography to determine their size. Zero-dimensional islands ("quantum dots") can be formed by using the forces from the lattice mismatch of two different materials while one-dimensional "nanowires" can be formed by anisotropic lattice mismatch or by enhanced deposition at metal particles that act as catalysts for decomposition of gaseous precursors.
After a short review of the constraints on scaling of conventional electronics, the rest of the talk will focus on forming small structures using self-assembly and directed assembly. We will discuss forming, ordering, and aligning small germanium and titanium-silicide islands on silicon to achieve zero-dimensional structures and on growing metal-catalyzed silicon nanowires to form one-dimensional structures.
Biography of Dr. Ted Kamins |
Ted Kamins is Principal Scientist in the Quantum Science Research group at Hewlett-Packard Laboratories in Palo Alto, California, where he is conducting research on advanced nanostructured electronic materials and devices. He is also a Consulting Professor in the Electrical Engineering Department at Stanford University. He received his degrees from the University of California, Berkeley. He then joined the Research and Development Laboratory of Fairchild Semiconductor, where he worked with epitaxial and polycrystalline silicon before moving to Hewlett-Packard. Ted is co-author with R. S. Muller of the textbook "Device Electronics for Integrated Circuits" and is author of the book "Polycrystalline Silicon for Integrated Circuits and Displays." He is a Fellow of the IEEE and a Fellow of the Electrochemical Society. He received the 1989 Electronics Division Award of the Electrochemical Society.
