Seminar Series on Nanotechnology
Extending Moore's Law with Silicon Nanotechnology Fu-Chang Lo
Intel CorporationNovember 5, 2003, 3:30-5 p.m.
Room 326, Bannan Engineering Bldg.
Santa Clara University
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Nanotechnology has become a major and very exciting field for research and development as it presents tremendous potential for a variety of applications. In the silicon and electronics world, nanotechnology is already here in state-of-the-art high-speed silicon CMOS process technologies with feature sizes less than 100nm. Silicon nanotechnology process scaling will continue for the next 15 years and convergence with other technologies such as MEMS, optoelectronics, MRAM, and others is likely to happen in the same period. Beyond that, alternative new technologies will emerge and begin to be integrated into BiCMOS by 2015. Research in nanoscience is needed to facilitate these new radical scalable technologies beyond 2020. The purpose of this presentation is to give an overview of silicon nanotechnology from its brief history and current scaling status, to future possibilities Alternative new emerging technologies will be highlighted. It is believed that nanotechnology will continue to create new capabilities to extend Moore's Law for both computing and communication.
Biography of Dr. Fu-Chang Lo |
Fu-Chang Lo is an Assistant Director of Components Research at Intel Corporation, where he manages advanced mask technology research, and coordinates a 32nm node research forum and logic technology patent program. He also serves as a member of the Overseas Program Committee of the Photomask Japan Symposium. He joined Intel in 1983 and held various management positions in the areas of mask, lithography, and plasma etching. Prior to joining Intel, he was with the Kodak Research Laboratories of Eastman Kodak Company from 1979 to 1983, developing high-resolution patterning technology. Dr. Lo received his MS in Physics from the University of Cincinnati in 1974 and his MSEE and Ph.D. in Electrical Engineering from Purdue University in 1976 and 1979, respectively.
