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TENT Laboratory



1500 sq. ft. clean room in a 3000 sq. ft. laboratory located in the School of Engineering.

  • Newly remodeled (Summer 2006)
  • Card-swipe access to authorized users only
  • Equipment use coordinated by lab manager
  • Authorized users have personalized accounts to equipment

Nanostructure Fabrication and Characterization Facility

This facility is a 1300 sq. ft. leased lab space located in NASA Ames Research Center, which features the following:

  • Plasma-enhanced chemical vapor deposition (PECVD) system
  • Magnetron sputtering system
  • Scanning electron microscope (SEM) with electron beam deposition capability
  • Thermal imaging system for nanoscale devices
  • Thermal interface materials (TIM) resistance measurement system
  • Chemical fume hood
  • De-ionized water
  • Compressed air and natural gas lines

Specialized Equipment

Scanning Electron Microscope

High-resolution field-emission scanning electron microscope (SEM): Hitachi S-4800

  • High-resolution 1.0 nm at 10 kV / 2.0 nm at 1.0 kV
  • Chemical analysis through Energy Dispersive X-ray (EDX) spectroscopy
  • Scanning Transmission Electron Microscopy (STEM) for cross-sectional imaging

Electrical Measurement System

Water probe station (Cascade Microtech 12000 series) & Current-voltage (I-V), capacitance-voltage (C-V), and high-frequency characteristics of nanostructures

  • Temperature controller (-65°C to 200°C)
  • Semiconductor parameter analyzer (Agilent 4156C)
  • Impedance analyzer (Agilent 4294A)
  • Vector network analyzer (up to 65GHz) (Anritsu)

Atomic Force Microscope

High-resolution scanning probe microscope for nanostructure surface characterization

  • Noise and vibration isolation bench

Full range of SPM techniques

  • Electrical characterization measurements
  • Electric Force Microscopy (EFM) (tapping mode)
  • Tunnel AFM (TUNA) (contact mode)
  • Conductive Atomic Force Microscopy (CAFM) (contact mode)
  • Scanning Spreading Resistance Microscopy (SSRM) (contact mode)
  • Scanning Capacitance Microscopy (SCM) (contact)
  • Multi-channel output

Contact Us

Director: Cary Y. Yang

Santa Clara University
School of Engineering
500 El Camino Real
Santa Clara, CA 95053

Daly Science 200, Bldg. 211

408-554-5474 fax