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Center for Nanostructures


Hitachi S-4800 Field Emission SEM

Resolution Accelerating voltage 15 kV, working distance 4 mm - 1.0 nm
Accelerating voltage 1 kV, working distance 1.5 mm - 2.0 nm


Magnification: High magnification mode - 100X to 800,000X
Low magnification mode - 30X to 2,000X

Electron Optics


Electron Gun - Cold cathode field emission type
Extracting voltage - 0 to 6.5 kV
Accelerating voltage - 0.5 to 30 kV
Lens - 3-stage electromagnetic lens, reduction type
Objective lens aperture - movable aperture
Astigmatism correction coil - electromagnetic type
Scanning coil - 2-stage electromagnetic-deflection type

Specimen Stage


Tilt -5 degrees to +70 degrees
Rotation 360 degrees (continuous)
Specimen size - Max. 150 mm diameter (airlock specimen exchange)


Scanning Transmission Electron Microscope (STEM)

Resolution 1.5 nm (with accelerating voltage 30 kV, WD 8 mm and magnification 150,000X)
Detector Scintillator + photomultiplier system
Specimen Thin-sectioned specimen mounted on a 3 mm diameter specimen grid
Mode Bright field image


Zyvex IC Nanoprober System

Sample Size 12 mm diameter

Veeco Dimension 3100 Scanning Probe Microscope (SPM) and Atomic Force Microscope (AFM) System

Resolution Lateral resolution ~ 5 nm
Vertical resolution ~ 1 nm
Sample Size Up to 200 mm diameter and 12 mm thick
Mode Tapping; Contact AFM; Magnetic Force; Electric Force; Force Modulation; Fluid Contact AFM; Fluid Tapping; Tunneling/Conductive AFM
Optical System 410-1845X magnification range
Color video camera
Motorized zoom system


CASCADE Microtech Summit 12000 Series Probe Station

Stage Size 200 mm diameter
Stage Temp. Range Ambient to 200 degrees C


Additional Equipment

OAI Model 200 Mask Aligner

FUJIFILM Dimatix Materials Printer, DMP-2800 Series

Gaertner Ellipsometer L116B

Contact Us

Director: Dr. Unyoung (Ashley) Kim
Lab Manager: Shaun Park Snyder

Santa Clara University
School of Engineering
500 El Camino Real
Santa Clara, CA 95053

Daly Science 200, Bldg. 211