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Center for Nanostructures

Equipment

Hitachi S-4800 Field Emission SEM

Resolution Accelerating voltage 15 kV, working distance 4 mm - 1.0 nm
Accelerating voltage 1 kV, working distance 1.5 mm - 2.0 nm
Magnification

 

Magnification: High magnification mode - 100X to 800,000X
Low magnification mode - 30X to 2,000X

Electron Optics

 

Electron Gun - Cold cathode field emission type
Extracting voltage - 0 to 6.5 kV
Accelerating voltage - 0.5 to 30 kV
Lens - 3-stage electromagnetic lens, reduction type
Objective lens aperture - movable aperture
Astigmatism correction coil - electromagnetic type
Scanning coil - 2-stage electromagnetic-deflection type

Specimen Stage

 

Tilt -5 degrees to +70 degrees
Rotation 360 degrees (continuous)
Specimen size - Max. 150 mm diameter (airlock specimen exchange)

 

Scanning Transmission Electron Microscope (STEM)

Specifications:
Resolution 1.5 nm (with accelerating voltage 30 kV, WD 8 mm and magnification 150,000X)
Detector Scintillator + photomultiplier system
Specimen Thin-sectioned specimen mounted on a 3 mm diameter specimen grid
Mode Bright field image

 

Zyvex IC Nanoprober System

Specifications:
Sample Size 12 mm diameter

Veeco Dimension 3100 Scanning Probe Microscope (SPM) and Atomic Force Microscope (AFM) System

Resolution Lateral resolution ~ 5 nm
Vertical resolution ~ 1 nm
Sample Size Up to 200 mm diameter and 12 mm thick
Mode Tapping; Contact AFM; Magnetic Force; Electric Force; Force Modulation; Fluid Contact AFM; Fluid Tapping; Tunneling/Conductive AFM
Optical System 410-1845X magnification range
Color video camera
Motorized zoom system

 

CASCADE Microtech Summit 12000 Series Probe Station

Stage Size 200 mm diameter
Stage Temp. Range Ambient to 200 degrees C

 

Additional Equipment

OAI Model 200 Mask Aligner

FUJIFILM Dimatix Materials Printer, DMP-2800 Series

Gaertner Ellipsometer L116B